Fully Integrated System

Embedded PC Control with integrated safety monitoring.

Auto Profiles

Suitable for unattended operation.

915 MHz, 15kW and 20kW

Dual-differential pumped O-rings.

Typical Growth area = 50 – 150 mm, process dependent.

Process Pressure – 20-250 torr

Stage 160 mm water cooled stage standard.

Adjustable substrate height, in-situ

Optional stages are available, including heated, temp. controlled and bias capable. Please inquire.

Deposition Rates and area are process dependent, so please inquire.